PECVD coating equipment process flow:

Product advantages:

· Inline multi cavity quasi dynamic PECVD coating technology

· Layered high quality amorphous silicon passivation coating technology

· Structure design of showerhead discharge cathode with multilayer gas distribution in PECVD

· Design of composite carrier plate with large size, light load, low thermal expansion coefficient and high flatness

· Inline corrosion-resistant magnetic fluid vacuum transfer large size carrier plate

· RF fast lighting setting and glow real-time monitoring