PVD coating equipment process flow:

Product advantages:

· Composite structure design carrier plate with large size, light load, low thermal expansion coefficient and high flatness for PVD coating of hjt high efficiency battery

· Structure design of PVD cavity with high capacity and low fragmentation rate for hjt high efficiency battery

· Structure design of PVD cathode with high magnetic field, low temperature and high sputtering rate

· Fast and uniform heating unit design

· Design of PVD cathode cavity with low film nonuniformity

· On line PVD high speed and fast tempo high quality TCO film coating technology